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SHANGHAI FAMOUS TRADE CO.,LTD
Verified Supplier
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| Brand Name: | ZMSH |
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| Model Number: | LPCVD Oxidation Furnace |
| Certification: | rohs |
| Place of Origin: | CHINA |
| Minimum Order: | 2 |
| Price: | by case |
| Payment Terms: | T/T |
| Delivery Time: | 5-10months |
| Wafer size: | 6/8/12 inch wafer |
| Compatible Materials: | Polycrystalline silicon, silicon nitride, silicon oxide |
| Oxidation: | Dry oxygen/Wet oxygen (DCE, HCL) |
| Process temperature range: | 500°C-900°C |
| Temperature control accuracy: | ±1°C |
| Application: | Power semiconductors, Substrate materials |
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